| The surface/bulk micromachining (SBM) process: a new method for fabricating released MEMS in single crystal silicon S Lee, S Park, DI Cho Journal of Microelectromechanical Systems 8 (4), 409-416, 1999 | 176 | 1999 |
| Surface/bulk micromachined single-crystalline-silicon micro-gyroscope S Lee, S Park, J Kim, S Lee, DI Cho Journal of Microelectromechanical Systems 9 (4), 557-567, 2000 | 153 | 2000 |
| Isolation in micromachined single crystal silicon using deep trench insulation DI Cho, S Lee, S Park, S Lee US Patent 6,472,290, 2002 | 46 | 2002 |
| The effects of post-deposition processes on polysilicon Young's modulus S Lee, C Cho, J Kim, S Park, S Yi, J Kim, DD Cho Journal of micromechanics and microengineering 8 (4), 330, 1998 | 35 | 1998 |
| Surface/bulk micromachining (SBM) process and deep trench oxide isolation method for MEMS S Lee, S Park, D Cho, Y Oh International Electron Devices Meeting 1999. Technical Digest (Cat. No …, 1999 | 34 | 1999 |
| A new micromachining technique with (111) silicon S Lee, S Park, D Cho Japanese journal of applied physics 38 (5R), 2699, 1999 | 30 | 1999 |
| Mesa-supported, single-crystal microstructures fabricated by the surface/bulk micromachining process SPS Park, SLS Lee, SYS Yi, DDC Dong-il, D Cho Japanese journal of applied physics 38 (7R), 4244, 1999 | 27 | 1999 |
| Triple layer isolation for silicon microstructure and structures formed using the same DI Cho, S Lee, S Park US Patent 6,569,702, 2003 | 24 | 2003 |
| Surface/bulk micromachined high performance silicon micro-gyroscope D Cho, S Lee, S Park Proceedings of the Solid-State Sensor Actuator Workshop, 2000 | 21 | 2000 |
| Honeycomb-shaped deep-trench oxide posts combined with the SBM technology for micromachining single-crystal silicon without using SOI SC Lee, S Park, DD Cho Sensors and Actuators A: Physical 97, 734-738, 2002 | 14 | 2002 |
| Micromechanical system fabrication method using (111) single crystalline silicon DI Cho, S Lee, S Park US Patent 6,150,275, 2000 | 13 | 2000 |
| Electrostatic actuation of surface/bulk micromachined single-crystal silicon microresonators S Lee, S Park, S Yi, S Lee, DIID Cho, B Ha, Y Oh, C Song Proceedings 1999 IEEE/RSJ International Conference on Intelligent Robots and …, 1999 | 11 | 1999 |
| Micromechanical system fabrication method using (111) single crystalline silicon DI Cho, S Lee, S Park US Patent 6,689,694, 2004 | 3 | 2004 |
| Dry and wet etching with (111) silicon for high-performance micro and nano systems DIL " DAN" CHO, BD Choi, S Lee, SJ PAIK, S Park, J Park, Y Park, J Kim, ... International Journal of Computational Engineering Science 4 (02), 181-187, 2003 | 2 | 2003 |
| Tactical Grade MEMS Gyroscopes Fabricated by the SBM Process D Dan Cho, S Park, J Kim, S Lee, SW Lee Materials & Process Integration for MEMS, 257-272, 2002 | | 2002 |
| A New Micromachining Technology Using S Lee, S Park, D Cho Digest of Papers. Microprocesses and Nanotechnology'98. 198 International …, 1998 | | 1998 |
