| Illumination system for a microlithographic projection exposure apparatus J Wangler, H Siekmann, K Weible, R Scharnweber, M Maul, ... US Patent 8,395,756, 2013 | 36 | 2013 |
| Array of microlenses with integrated illumination P Schmaelzle, J Duparre, M Punke, P Dannberg, R Voelkel, A Braeuer US Patent 8,792,174, 2014 | 16 | 2014 |
| Optical beam deflecting element, illumination system including same, and related method D Runde, F Doll, R Voelkel, K Weible, G Weiss, M Gerhard US Patent 9,025,131, 2015 | 9 | 2015 |
| Simulation tools for advanced mask aligner lithography A Bramati, U Vogler, B Meliorisz, K Motzek, M Hornung, R Voelkel Optical Design and Engineering IV 8167, 257-266, 2011 | 7 | 2011 |
| Comparison of two reconfigurableN×N interconnects for a recurrent neural network C Berger, N COllings, AR Pourzand, R Volkel Optical review 3, A388-A390, 1996 | 6 | 1996 |
| Illumination system for a microlithographic projection exposure apparatus J Wangler, H Siekmann, K Weible, R Scharnweber, M Maul, ... US Patent 9,217,930, 2015 | 5 | 2015 |
| Shaping intensity behind amplitude masks for proximity correction lithography: design, measurement, and realization K Puthankovilakam, T Scharf, Q Tan, HP Herzig, D Nguyen, U Vogler, ... Interferometry XVII: Techniques and Analysis 9203, 350-357, 2014 | 4 | 2014 |
| Micro-optics and lithography simulation are key enabling technologies for shadow printing lithography in mask aligners R Voelkel, U Vogler, A Bramati, W Noell Advanced Optical Technologies 4 (1), 63-69, 2015 | 3 | 2015 |
| A reconfigurable interconnect for neural network and switching applications C Berger, N Collings, AR Pourzand, R Völkel Free-Space Micro-Optical Systems, 50-51, 1995 | 3 | 1995 |
| Biomimetic vision systems R Voelkel Biologically Inspired Computer Vision: Fundamentals and Applications, 143-174, 2015 | 2 | 2015 |
| Overview of characterization and metrology techniques for microlenses and microlens arrays MS Kim, L Allegre, J Sunarjo, W Noell, R Voelkel Optical Measurement Systems for Industrial Inspection IX 9525, 317-324, 2015 | 2 | 2015 |
| Deformable silicon membrane for dynamic linear laser beam diffuser J Masson, A Bich, HP Herzig, R Bitterli, W Noell, T Scharf, R Voelkel, ... MOEMS and Miniaturized Systems IX 7594, 136-143, 2010 | 2 | 2010 |
| 13.11 Aspherical Microlenses Manufactured by Wafer-BasedTechnology M Eisner, R Völkel, KJ Weible Advanced Optics using Aspherical Elements 173, 277, 2008 | 2 | 2008 |
| Homogenous monochromatic irradiance fields generated by microlens arrays P Blattner, R Voelkel Proc. of NEWRAD, 135-136, 2008 | 2 | 2008 |
| Refractive micolens arrays for photolithography M Eisner, C Ossmann, R Voelkel, E Feick, P Kaiser, S Seider, S Week, ... Diffractive Optics and Micro-Optics, DTuD35, 2000 | 2 | 2000 |
| Micro‐Optics for Photolithography: Key enabling technology for wafer‐based manufacturing technology R Voelkel Optik & Photonik 10 (4), 30-33, 2015 | 1 | 2015 |
| Optoelectronic interconnects with holographic optical elements H Kobolla, N Lindlein, O Falkenstorfer, S Rosner, J Schmidt, J Schwider, ... 1991 Third International Conference on Holographic Systems, Components and …, 1991 | 1 | 1991 |
| Device for optical imaging J Duparre, F Wippermann, A Brueckner, A Braeuer, R Leitel, R Voelkel US Patent 9,383,557, 2016 | | 2016 |
| Interferometric study on Gouy phase anomaly of microlens array MS Kim, T Scharf, W Noell, HP Herzig, R Voelkel Practical Holography XXIX: Materials and Applications 9386, 247-252, 2015 | | 2015 |
| Longitudinal-Differential Interferometry: Axial Phase Study of Light for Micro-and Nano-optical Problems MS Kim, T Scharf, HP Herzig, R Voelkel Fringe 2013: 7th International Workshop on Advanced Optical Imaging and …, 2014 | | 2014 |
