| Measurement of bandgap energies in low-k organosilicates MT Nichols, W Li, D Pei, GA Antonelli, Q Lin, S Banna, Y Nishi, JL Shohet Journal of Applied Physics 115 (9), 2014 | 135 | 2014 |
| The effect of water uptake on the mechanical properties of low-k organosilicate glass X Guo, JE Jakes, MT Nichols, S Banna, Y Nishi, JL Shohet Journal of Applied Physics 114 (8), 2013 | 41 | 2013 |
| Time-dependent dielectric breakdown of plasma-exposed porous organosilicate glass MT Nichols, H Sinha, CA Wiltbank, GA Antonelli, Y Nishi, JL Shohet Applied Physics Letters 100 (11), 2012 | 41 | 2012 |
| Charge trapping within UV and vacuum UV irradiated low-k porous organosilicate dielectrics JL Lauer, H Sinha, MT Nichols, GA Antonelli, Y Nishi, JL Shohet Journal of The Electrochemical Society 157 (8), G177, 2010 | 41 | 2010 |
| The effects of vacuum ultraviolet radiation on low-k dielectric films H Sinha, H Ren, MT Nichols, JL Lauer, M Tomoyasu, NM Russell, G Jiang, ... Journal of Applied Physics 112 (11), 2012 | 40 | 2012 |
| Effect of vacuum ultraviolet and ultraviolet Irradiation on capacitance-voltage characteristics of low-k-porous organosilicate dielectrics H Sinha, JL Lauer, MT Nichols, GA Antonelli, Y Nishi, JL Shohet Applied Physics Letters 96 (5), 2010 | 30 | 2010 |
| Defects in low-k organosilicate glass and their response to processing as measured with electron-spin resonance H Ren, MT Nichols, G Jiang, GA Antonelli, Y Nishi, JL Shohet Applied Physics Letters 98 (10), 2011 | 18 | 2011 |
| Surface potential due to charge accumulation during vacuum ultraviolet exposure for high-k and low-k dielectrics H Ren, H Sinha, A Sehgal, MT Nichols, GA Antonelli, Y Nishi, JL Shohet Applied Physics Letters 97 (7), 2010 | 15 | 2010 |
| Effect of vacuum ultraviolet and ultraviolet irradiation on mobile charges in the bandgap of low-k-porous organosilicate dielectrics H Sinha, MT Nichols, A Sehgal, M Tomoyasu, NM Russell, GA Antonelli, ... Journal of Vacuum Science & Technology A 29 (1), 2011 | 12 | 2011 |
| The effects of plasma exposure and vacuum ultraviolet irradiation on photopatternable low-k dielectric materials MT Nichols, K Mavrakakis, Q Lin, JL Shohet Journal of Applied Physics 114 (10), 2013 | 10 | 2013 |
| Time-dependent dielectric breakdown measurements of porous organosilicate glass using mercury and solid metal probes D Pei, MT Nichols, SW King, JS Clarke, Y Nishi, JL Shohet Journal of Vacuum Science & Technology A 32 (5), 2014 | 7 | 2014 |
| Effect of the dielectric–substrate interface on charge accumulation from vacuum ultraviolet irradiation of low-k porous organosilicate dielectrics H Sinha, A Sehgal, H Ren, MT Nichols, M Tomoyasu, NM Russell, Y Nishi, ... Thin Solid Films 519 (16), 5464-5466, 2011 | 7 | 2011 |
| The effects of processing induced damage on electrical conduction mechanisms and time-dependent dielectric breakdown of low-k organosilicates MT Nichols The University of Wisconsin-Madison, 2013 | 5 | 2013 |
| Dielectric damage JL Shohet, Q Lin, SW King, H Ren, S Banna, JE Jakes, RJ Agasie, M Naik, ... ECS Transactions 60 (1), 733, 2014 | 4 | 2014 |
| The effects of plasma exposure on low-k dielectric materials JL Shohet, H Ren, MT Nichols, H Sinha, W Lu, K Mavrakakis, Q Lin, ... Advanced Etch Technology for Nanopatterning 8328, 94-109, 2012 | 3 | 2012 |
| Damage to low-k porous organosilicate glass from vacuum-ultraviolet irradiation JL Shohet, H Sinha, H Ren, MT Nichols, Y Nishi, M Tomoyasu, ... Damage to VUV, EUV, and X-ray Optics III 8077, 173-190, 2011 | 3 | 2011 |
| Kelvin Probe H Sinha, J Lauer, M Nichols, JL Shohet Encyclopedia of Plasma Technology-Two Volume Set, 692-695, 2016 | | 2016 |
| Dielectric damage H Ren, S Banna, JE Jakes, RJ Agasie, M Naik, Y Nishi, MT Nichols, ... ECS Transactions, 2014 | | 2014 |
| Surface photoconductivity of organosilicate glass dielectrics induced by vacuum-ultraviolet radiation H Zheng, MT Nichols, D Pei, Y Nishi, JL Shohet Journal of Applied Physics 114 (6), 2013 | | 2013 |
| Effects of plasma exposure on defects in novel dielectric materials H Ren, MT Nichols, G Jiang, GA Antonelli, Y Nishi, JL Shohet 2011 Abstracts IEEE International Conference on Plasma Science, 1-1, 2011 | | 2011 |
G. Andrew AntonelliVP of Advanced R&D, Onto Innovation, Inc.ontoinnovation.com의 이메일 확인됨
