Dipole model explaining high-/metal gate field effect transistor threshold voltage tuning PD Kirsch, P Sivasubramani, J Huang, CD Young, MA Quevedo-Lopez, ... Applied Physics Letters 92 (9), 092901, 2008 | 195 | 2008 |
The effect of interfacial layer properties on the performance of Hf-based gate stack devices G Bersuker, CS Park, J Barnett, PS Lysaght, PD Kirsch, CD Young, ... Journal of Applied Physics 100 (9), 094108, 2006 | 187 | 2006 |
Large ferroelectric polarization of TiN/Hf0.5Zr0.5O2/TiN capacitors due to stress-induced crystallization at low thermal budget SJ Kim, D Narayan, JG Lee, J Mohan, JS Lee, J Lee, HS Kim, YC Byun, ... Applied Physics Letters 111 (24), 242901, 2017 | 175 | 2017 |
Mechanism of Electron Trapping and Characteristics of Traps in Gate Stacks G Bersuker, JH Sim, CS Park, CD Young, SV Nadkarni, R Choi, BH Lee IEEE Transactions on Device and Materials Reliability 7 (1), 138-145, 2007 | 150 | 2007 |
High-k gate stacks for planar, scaled CMOS integrated circuits HR Huff, A Hou, C Lim, Y Kim, J Barnett, G Bersuker, GA Brown, ... Microelectronic Engineering 69 (2-4), 152-167, 2003 | 117 | 2003 |
Conventional n-Channel MOSFET Devices Using Single Layer HfO~ 2 and ZrO~ 2 as High-k Gate Dielectrics with Polysilicon Gate Electrode Y Kim, G Gebara, M Freiler, J Barnett, D Riley, J Chen, K Torres, JE Lim, ... International Electron Devices Meeting, 455-458, 2001 | 90 | 2001 |
Effect of film thickness on the ferroelectric and dielectric properties of low-temperature (400 °C) Hf0.5Zr0.5O2 films SJ Kim, J Mohan, J Lee, JS Lee, AT Lucero, CD Young, L Colombo, ... Applied Physics Letters 112 (17), 172902, 2018 | 89 | 2018 |
Interfacial layer-induced mobility degradation in high-k transistors G Bersuker, J Barnett, N Moumen, B Foran, CD Young, P Lysaght, ... Japanese Journal of Applied Physics 43 (11S), 7899, 2004 | 89 | 2004 |
Breakdown in the metal/high-k gate stack: Identifying the “weak link” in the multilayer dielectric G Bersuker, D Heh, C Young, H Park, P Khanal, L Larcher, A Padovani, ... 2008 IEEE International Electron Devices Meeting, 1-4, 2008 | 87 | 2008 |
Electron trap generation in high-/spl kappa/gate stacks by constant voltage stress CD Young, D Heh, SV Nadkarni, R Choi, JJ Peterson, J Barnett, BH Lee, ... IEEE Transactions on Device and Materials Reliability 6 (2), 123-131, 2006 | 87 | 2006 |
Effect of Pre-Existing Defects on Reliability Assessment of High-K G Bersuker, JH Sim, CD Young, R Choi, PM Zeitzoff Microelectronics Reliability 44, 1509-1512, 2004 | 84 | 2004 |
Intrinsic characteristics of high-k devices and implications of fast transient charging effects (FTCE) BH Lee, CD Young, R Choi, JH Sim, G Bersuker, CY Kang, R Harris, ... IEDM Technical Digest. IEEE International Electron Devices Meeting, 2004 …, 2004 | 82 | 2004 |
Spatial distributions of trapping centers in gate stacks D Heh, CD Young, GA Brown, PY Hung, A Diebold, G Bersuker, EM Vogel, ... Applied physics letters 88 (15), 152907, 2006 | 76 | 2006 |
Dipole Moment Model Explaining nFET Vt Tuning Utilizing La, Sc, Er, and Sr Doped HfSiON Dielectrics P Sivasubramani, TS Boscke, J Huang, CD Young, PD Kirsch, ... 2007 IEEE Symposium on VLSI Technology, 68-69, 2007 | 74 | 2007 |
Effects of ALD HfO2 thickness on charge trapping and mobility JH Sim, SC Song, PD Kirsch, CD Young, R Choi, DL Kwong, BH Lee, ... Microelectronic Engineering 80, 218-221, 2005 | 73 | 2005 |
Experimental Evidence of the Fast and Slow Charge Trapping/Detrapping Processes in High- k Dielectrics Subjected to PBTI Stress D Heh, CD Young, G Bersuker IEEE electron device letters 29 (2), 180-182, 2008 | 68 | 2008 |
Ultra-short pulse current–voltage characterization of the intrinsic characteristics of high-κ devices CD Young, Y Zhao, M Pendley, BH Lee, K Matthews, JH Sim, R Choi, ... Japanese journal of applied physics 44 (4S), 2437, 2005 | 67 | 2005 |
Pulsed – Methodology and Its Application to Electron-Trapping Characterization and Defect Density Profiling CD Young, Y Zhao, D Heh, R Choi, BH Lee, G Bersuker IEEE Transactions on electron devices 56 (6), 1322-1329, 2009 | 64 | 2009 |
Evaluation of border traps and interface traps in HfO2/MoS2 gate stacks by capacitance–voltage analysis P Zhao, A Khosravi, A Azcatl, P Bolshakov, G Mirabelli, E Caruso, ... 2D Materials 5 (3), 031002, 2018 | 61 | 2018 |
Gate first high-k/metal gate stacks with zero SiOx interface achieving EOT=0.59nm for 16nm application J Huang, D Heh, P Sivasubramani, PD Kirsch, G Bersuker, DC Gilmer, ... 2009 Symposium on VLSI Technology, 34-35, 2009 | 61 | 2009 |