PZT‐based piezoelectric MEMS technology GL Smith, JS Pulskamp, LM Sanchez, DM Potrepka, RM Proie, TG Ivanov, ... Journal of the American Ceramic Society 95 (6), 1777-1792, 2012 | 257 | 2012 |
Piezoelectric PZT MEMS technologies for small-scale robotics and RF applications JS Pulskamp, RG Polcawich, RQ Rudy, SS Bedair, RM Proie, T Ivanov, ... MRS bulletin 37 (11), 1062-1070, 2012 | 130 | 2012 |
Integrated thin-film piezoelectric traveling wave ultrasonic motors GL Smith, RQ Rudy, RG Polcawich, DL DeVoe Sensors and Actuators A: Physical 188, 305-311, 2012 | 72 | 2012 |
Effects of DC bias tuning on air-coupled PZT piezoelectric micromachined ultrasonic transducers Y Kusano, Q Wang, GL Luo, Y Lu, RQ Rudy, RG Polcawich, DA Horsley journal of microelectromechanical systems 27 (2), 296-304, 2018 | 64 | 2018 |
Millimeter-scale traveling wave rotary ultrasonic motors RQ Rudy, GL Smith, DL DeVoe, RG Polcawich Journal of Microelectromechanical Systems 24 (1), 108-114, 2014 | 56 | 2014 |
Silicon nitride stress-optic microresonator modulator for optical control applications J Wang, K Liu, MW Harrington, RQ Rudy, DJ Blumenthal Optics Express 30 (18), 31816-31827, 2022 | 35 | 2022 |
Advances in piezoelectric PZT-based RF MEMS components and systems RR Benoit, RQ Rudy, JS Pulskamp, RG Polcawich, SS Bedair Journal of Micromechanics and Microengineering 27 (8), 083002, 2017 | 33 | 2017 |
Boosting MEMS piezoelectric transformer figures of merit via architecture optimization SS Bedair, JS Pulskamp, R Rudy, R Polcawich, R Cable, L Griffin IEEE Electron Device Letters 39 (3), 428-431, 2018 | 30 | 2018 |
Accounting for the various contributions to pyroelectricity in lead zirconate titanate thin films B Hanrahan, Y Espinal, C Neville, R Rudy, M Rivas, A Smith, MT Kesim, ... Journal of Applied Physics 123 (12), 2018 | 26 | 2018 |
Wideband air-coupled PZT piezoelectric micromachined ultrasonic transducer through DC bias tuning Y Kusano, Q Wang, RQ Rudy, RG Polcawich, DA Horsley 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems …, 2017 | 26 | 2017 |
Effect of top electrode material on radiation-induced degradation of ferroelectric thin film structures SJ Brewer, CZ Deng, CP Callaway, MKK Paul, KJ Fisher, JE Guerrier, ... Journal of Applied Physics 120 (2), 2016 | 25 | 2016 |
Thin-film piezoelectric and high-aspect ratio polymer leg mechanisms for millimeter-scale robotics J Choi, M Shin, RQ Rudy, C Kao, JS Pulskamp, RG Polcawich, ... International Journal of Intelligent Robotics and Applications 1, 180-194, 2017 | 23 | 2017 |
Piezoelectric RF MEMS switches on Si-on-Sapphire substrates RR Benoit, RQ Rudy, JS Pulskamp, RG Polcawich Journal of Microelectromechanical Systems 29 (5), 1087-1090, 2020 | 22 | 2020 |
Ferroelectric pzt mems hf/vhf resonators/filters JS Pulskamp, RQ Rudy, SS Bedair, JM Puder, MG Breen, RG Polcawich 2016 IEEE International Frequency Control Symposium (IFCS), 1-4, 2016 | 22 | 2016 |
Enhanced radiation tolerance in Mn-doped ferroelectric thin films SJ Brewer, SC Williams, LA Griffin, CD Cress, M Rivas, RQ Rudy, ... Applied Physics Letters 111 (2), 2017 | 16 | 2017 |
Thin-film piezoelectric transformers operating in harmonics of out-of-plane flexure modes SS Bedair, JS Pulskamp, RG Polcawich, RQ Rudy, J Puder 2015 Transducers-2015 18th International Conference on Solid-State Sensors …, 2015 | 15 | 2015 |
Piezoelectric disk flexure resonator with 1 dB loss RQ Rudy, JS Pulskamp, SS Bedair, JM Puder, RG Polcawich 2016 IEEE international frequency control symposium (IFCS), 1-4, 2016 | 14 | 2016 |
Higher dimensional flexure mode for enhanced effective electromechanical coupling in PZT-on-silicon MEMS resonators JM Puder, SS Bedair, JS Pulskamp, RQ Rudy, RG Polcawich, SA Bhave 2015 Transducers-2015 18th International Conference on Solid-State Sensors …, 2015 | 14 | 2015 |
1-port piezoelectric resonators with> 100 V/V gain MEG Klemash, SS Bedair, DA Diamond, RQ Rudy, VFG Tseng, ... Journal of Microelectromechanical Systems 29 (5), 874-880, 2020 | 13 | 2020 |
AT-cut quartz piezoelectric transformers for passive voltage gain in an RF front-end ME Galanko, SS Bedair, R Rudy, VFG Tseng, JS Pulskamp, I Kierzewski IEEE Electron Device Letters 40 (10), 1670-1673, 2019 | 13 | 2019 |