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Ryan Q Rudy
Ryan Q Rudy
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PZT‐based piezoelectric MEMS technology
GL Smith, JS Pulskamp, LM Sanchez, DM Potrepka, RM Proie, TG Ivanov, ...
Journal of the American Ceramic Society 95 (6), 1777-1792, 2012
2572012
Piezoelectric PZT MEMS technologies for small-scale robotics and RF applications
JS Pulskamp, RG Polcawich, RQ Rudy, SS Bedair, RM Proie, T Ivanov, ...
MRS bulletin 37 (11), 1062-1070, 2012
1302012
Integrated thin-film piezoelectric traveling wave ultrasonic motors
GL Smith, RQ Rudy, RG Polcawich, DL DeVoe
Sensors and Actuators A: Physical 188, 305-311, 2012
722012
Effects of DC bias tuning on air-coupled PZT piezoelectric micromachined ultrasonic transducers
Y Kusano, Q Wang, GL Luo, Y Lu, RQ Rudy, RG Polcawich, DA Horsley
journal of microelectromechanical systems 27 (2), 296-304, 2018
642018
Millimeter-scale traveling wave rotary ultrasonic motors
RQ Rudy, GL Smith, DL DeVoe, RG Polcawich
Journal of Microelectromechanical Systems 24 (1), 108-114, 2014
562014
Silicon nitride stress-optic microresonator modulator for optical control applications
J Wang, K Liu, MW Harrington, RQ Rudy, DJ Blumenthal
Optics Express 30 (18), 31816-31827, 2022
352022
Advances in piezoelectric PZT-based RF MEMS components and systems
RR Benoit, RQ Rudy, JS Pulskamp, RG Polcawich, SS Bedair
Journal of Micromechanics and Microengineering 27 (8), 083002, 2017
332017
Boosting MEMS piezoelectric transformer figures of merit via architecture optimization
SS Bedair, JS Pulskamp, R Rudy, R Polcawich, R Cable, L Griffin
IEEE Electron Device Letters 39 (3), 428-431, 2018
302018
Accounting for the various contributions to pyroelectricity in lead zirconate titanate thin films
B Hanrahan, Y Espinal, C Neville, R Rudy, M Rivas, A Smith, MT Kesim, ...
Journal of Applied Physics 123 (12), 2018
262018
Wideband air-coupled PZT piezoelectric micromachined ultrasonic transducer through DC bias tuning
Y Kusano, Q Wang, RQ Rudy, RG Polcawich, DA Horsley
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems …, 2017
262017
Effect of top electrode material on radiation-induced degradation of ferroelectric thin film structures
SJ Brewer, CZ Deng, CP Callaway, MKK Paul, KJ Fisher, JE Guerrier, ...
Journal of Applied Physics 120 (2), 2016
252016
Thin-film piezoelectric and high-aspect ratio polymer leg mechanisms for millimeter-scale robotics
J Choi, M Shin, RQ Rudy, C Kao, JS Pulskamp, RG Polcawich, ...
International Journal of Intelligent Robotics and Applications 1, 180-194, 2017
232017
Piezoelectric RF MEMS switches on Si-on-Sapphire substrates
RR Benoit, RQ Rudy, JS Pulskamp, RG Polcawich
Journal of Microelectromechanical Systems 29 (5), 1087-1090, 2020
222020
Ferroelectric pzt mems hf/vhf resonators/filters
JS Pulskamp, RQ Rudy, SS Bedair, JM Puder, MG Breen, RG Polcawich
2016 IEEE International Frequency Control Symposium (IFCS), 1-4, 2016
222016
Enhanced radiation tolerance in Mn-doped ferroelectric thin films
SJ Brewer, SC Williams, LA Griffin, CD Cress, M Rivas, RQ Rudy, ...
Applied Physics Letters 111 (2), 2017
162017
Thin-film piezoelectric transformers operating in harmonics of out-of-plane flexure modes
SS Bedair, JS Pulskamp, RG Polcawich, RQ Rudy, J Puder
2015 Transducers-2015 18th International Conference on Solid-State Sensors …, 2015
152015
Piezoelectric disk flexure resonator with 1 dB loss
RQ Rudy, JS Pulskamp, SS Bedair, JM Puder, RG Polcawich
2016 IEEE international frequency control symposium (IFCS), 1-4, 2016
142016
Higher dimensional flexure mode for enhanced effective electromechanical coupling in PZT-on-silicon MEMS resonators
JM Puder, SS Bedair, JS Pulskamp, RQ Rudy, RG Polcawich, SA Bhave
2015 Transducers-2015 18th International Conference on Solid-State Sensors …, 2015
142015
1-port piezoelectric resonators with> 100 V/V gain
MEG Klemash, SS Bedair, DA Diamond, RQ Rudy, VFG Tseng, ...
Journal of Microelectromechanical Systems 29 (5), 874-880, 2020
132020
AT-cut quartz piezoelectric transformers for passive voltage gain in an RF front-end
ME Galanko, SS Bedair, R Rudy, VFG Tseng, JS Pulskamp, I Kierzewski
IEEE Electron Device Letters 40 (10), 1670-1673, 2019
132019
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