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Sergei Zotov, PhD
Sergei Zotov, PhD
Chief Scientist, EMCORE Fellow. EMCORE Corporation
emcore.com의 이메일 확인됨
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High quality factor resonant MEMS accelerometer with continuous thermal compensation
SA Zotov, BR Simon, AA Trusov, AM Shkel
IEEE Sensors Journal 15 (9), 5045-5052, 2015
1152015
High-range angular rate sensor based on mechanical frequency modulation
SA Zotov, AA Trusov, AM Shkel
Journal of microelectromechanical systems 21 (2), 398-405, 2012
982012
Sub-degree-per-hour silicon MEMS rate sensor with 1 million Q-factor
IP Prikhodko, SA Zotov, AA Trusov, AM Shkel
2011 16th International Solid-State Sensors, Actuators and Microsystems …, 2011
972011
Microscale glass-blown three-dimensional spherical shell resonators
IP Prikhodko, SA Zotov, AA Trusov, AM Shkel
Journal of Microelectromechanical Systems 20 (3), 691-701, 2011
922011
What is MEMS gyrocompassing? Comparative analysis of maytagging and carouseling
IP Prikhodko, SA Zotov, AA Trusov, AM Shkel
Journal of Microelectromechanical Systems 22 (6), 1257-1266, 2013
902013
Low-dissipation silicon tuning fork gyroscopes for rate and whole angle measurements
AA Trusov, IP Prikhodko, SA Zotov, AM Shkel
IEEE Sensors Journal 11 (11), 2763-2770, 2011
892011
Foucault pendulum on a chip: Rate integrating silicon MEMS gyroscope
IP Prikhodko, SA Zotov, AA Trusov, AM Shkel
Sensors and Actuators A: Physical 177, 67-78, 2012
882012
Quality factor maximization through dynamic balancing of tuning fork resonator
SA Zotov, BR Simon, IP Prikhodko, AA Trusov, AM Shkel
IEEE Sensors Journal 14 (8), 2706-2714, 2014
742014
Ultra-high Q silicon gyroscopes with interchangeable rate and whole angle modes of operation
AA Trusov, IP Prikhodko, SA Zotov, AR Schofield, AM Shkel
SENSORS, 2010 IEEE, 864-867, 2010
732010
Flat is not dead: Current and future performance of Si-MEMS quad mass gyro (QMG) system
AA Trusov, G Atikyan, DM Rozelle, AD Meyer, SA Zotov, BR Simon, ...
2014 IEEE/ION Position, Location and Navigation Symposium-PLANS 2014, 252-258, 2014
602014
Foucault pendulum on a chip: Angle measuring silicon MEMS gyroscope
IP Prikhodko, SA Zotov, AA Trusov, AM Shkel
2011 IEEE 24th International Conference on Micro Electro Mechanical Systems …, 2011
582011
Folded MEMS pyramid inertial measurement unit
SA Zotov, MC Rivers, AA Trusov, AM Shkel
IEEE Sensors Journal 11 (11), 2780-2789, 2011
572011
Three dimensional folded mems technology for multi-axis sensor systems
A Trusov, MC Rivers, SA Zotov, AM Shkel
US Patent 8,368,154, 2013
522013
Three-dimensional spherical shell resonator gyroscope fabricated using wafer-scale glassblowing
SA Zotov, AA Trusov, AM Shkel
Journal of microelectromechanical systems 21 (3), 509-510, 2012
522012
Silicon accelerometer with differential frequency modulation and continuous self-calibration
AA Trusov, SA Zotov, BR Simon, AM Shkel
2013 IEEE 26th International Conference on Micro Electro Mechanical Systems …, 2013
492013
High range digital angular rate sensor based on frequency modulation
A Trusov, S Zotov, A Shkel
US Patent 8,991,247, 2015
412015
Fully balanced micro-machined inertial sensor
D Senkal, SA Zotov, AM Shkel
US Patent 10,247,554, 2019
402019
Multi-axis chip-scale MEMS inertial measurement unit (IMU) based on frequency modulation
AA Trusov, SA Zotov, AM Shkel
US Patent 9,274,136, 2016
392016
Utilization of mechanical quadrature in silicon MEMS vibratory gyroscope to increase and expand the long term in-run bias stability
SA Zotov, BR Simon, G Sharma, AA Trusov, AM Shkel
2014 International Symposium on Inertial Sensors and Systems (ISISS), 1-4, 2014
352014
Frequency modulation based angular rate sensor
SA Zotov, IP Prikhodko, AA Trusov, AM Shkel
2011 IEEE 24th International Conference on Micro Electro Mechanical Systems …, 2011
352011
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