Controlled Fabrication of Multiwall Anatase TiO2 Nanotubular Architectures C Bae, Y Yoon, H Yoo, D Han, J Cho, BH Lee, MM Sung, MG Lee, J Kim, ... Chemistry of Materials 21 (13), 2574-2576, 2009 | 54 | 2009 |
Area-Selective ALD of TiO2 Nanolines with Electron-Beam Lithography J Huang, M Lee, A Lucero, L Cheng, J Kim The Journal of Physical Chemistry C 118 (40), 23306-23312, 2014 | 41 | 2014 |
Fabrication and applications of metal-oxide nano-tubes M Lee, TW Kim, C Bae, H Shin, J Kim Jom 62, 44-49, 2010 | 32 | 2010 |
Selective atomic layer deposition with electron-beam patterned self-assembled monolayers J Huang, M Lee, J Kim Journal of Vacuum Science & Technology A 30 (1), 2012 | 28 | 2012 |
Organic‐Inorganic Hybrid Nano‐laminates Fabricated by Ozone‐assisted Molecular‐atomic Layer Deposition J Huang, M Lee, A Lucero, J Kim Chemical Vapor Deposition 19 (4‐6), 142-148, 2013 | 17 | 2013 |
Investigation of particle agglomeration with in-situ generation of oxygen bubble during the tungsten chemical mechanical polishing (CMP) process YA Jeong, MK Poddar, HY Ryu, NP Yerriboina, TG Kim, J Kim, JD Park, ... Microelectronic Engineering 218, 111133, 2019 | 11 | 2019 |
7-Octenyltrichrolosilane/trimethyaluminum hybrid dielectrics fabricated by molecular-atomic layer deposition on ZnO thin film transistors J Huang, M Lee, AT Lucero, L Cheng, MW Ha, J Kim Japanese Journal of Applied Physics 55 (6S1), 06GK04, 2016 | 10 | 2016 |
Three-dimensional observation of TiO2 nanostructures by electron tomography YJ Suh, N Lu, SY Park, TH Lee, SH Lee, DK Cha, MG Lee, J Huang, ... Micron 46, 35-42, 2013 | 9 | 2013 |
One-dimensional nanomaterials for field effect transistor (FET) type biosensor applications MG Lee, A Lucero, JY Kim Transactions on Electrical and Electronic Materials 13 (4), 165-170, 2012 | 9 | 2012 |
Functionalization of a single TiO2 nanotube for bio sensor applications D Cha, M Lee, H Shin, MJ Kim, J Kim Microscopy and Microanalysis 15 (S2), 1180-1181, 2009 | 4 | 2009 |
Polishing slurry composition HJ Park, JH Kim, J Dai Park, MG Lee, JC Shin, SH Jin US Patent 11,001,732, 2021 | 2 | 2021 |
Fabrication of single TiO2 nanotube devices with Pt interconnections using electron-and ion-beam-assisted deposition M Lee, D Cha, J Huang, MW Ha, J Kim Japanese Journal of Applied Physics 55 (6S1), 06GG11, 2016 | 2 | 2016 |
Polishing slurry composition HJ Park, JH Kim, J Dai Park, MG Lee, JC Shin, SH Jin US Patent App. 16/189,207, 2019 | 1 | 2019 |
System and method for controlling composition for lithography process in real time using near infrared spectrometer KB Lee, JK Lee, MS Park, J Kim, MG Lee US Patent 7,307,259, 2007 | 1 | 2007 |
Chemical-mechanical polishing particle and polishing slurry composition comprising same WG Moon, JH Kim, KS Shin, J Dai Park, MG Lee, SH Jin, GH Lee, GS Cho, ... US Patent 11,787,974, 2023 | | 2023 |
Chemical mechanical polishing composition, chemical mechanical polishing slurry and method for polishing substrate P Hyejung, M Lee, J Park, J Kim US Patent 11,286,403, 2022 | | 2022 |
Chemical mechanical polishing slurry composition P Hyejung, M Lee, CY Park, MS Park, S Jin, GH Lee, J Park, J Kim US Patent App. 16/604,035, 2020 | | 2020 |
Single titanium dioxide nanotube device fabrication and biosensor applications M Lee Ph. D. Thesis, 2013 | | 2013 |
High Performance TiO 2 Nanotubes-Based Biosensors for Streptavidin Detection M Lee, A Lucero, T Kim, J Huang, M Kim, J Kim AIP Conference Proceedings, 2012 | | 2012 |
Electrical Characterization of TiO (2) Thin Films Prepared by Atomic Layer Deposition A Lucero, M Lee, J Kim AIP Conference Proceedings, 2012 | | 2012 |