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Evangelos Karageorgos
Evangelos Karageorgos
MCs student of Computer Science, University of Athens
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Design strategy for integrating DSA via patterning in sub-7 nm interconnects
I Karageorgos, J Ryckaert, MC Tung, HSP Wong, R Gronheid, J Bekaert, ...
SPIE Advanced Lithography, 97810N-97810N-9, 2016
192016
Design method and algorithms for directed self-assembly aware via layout decomposition in sub-7 nm circuits
I Karageorgos, J Ryckaert, R Gronheid, MC Tung, HSP Wong, ...
Journal of Micro/Nanolithography, MEMS, and MOEMS 15 (4), 043506-043506, 2016
102016
Design Method for the Integration of DSA Via Patterning in sub-7 nm Circuits
I Karageorgos, MC Tung, HSP Wong, E Karageorgos, R Gronheid, ...
Proc. INC12, 2016
2016
Templated DSA vias in sub-7 nm circuits: Design strategy and DSA-aware via decomposition
I Karageorgos, J Ryckaert, R Gronheid, MC Tung, HSP Wong, ...
International Symposium on DSA, 2016
2016
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학술자료 1–4