Design strategy for integrating DSA via patterning in sub-7 nm interconnects I Karageorgos, J Ryckaert, MC Tung, HSP Wong, R Gronheid, J Bekaert, ... SPIE Advanced Lithography, 97810N-97810N-9, 2016 | 19 | 2016 |
Design method and algorithms for directed self-assembly aware via layout decomposition in sub-7 nm circuits I Karageorgos, J Ryckaert, R Gronheid, MC Tung, HSP Wong, ... Journal of Micro/Nanolithography, MEMS, and MOEMS 15 (4), 043506-043506, 2016 | 10 | 2016 |
Design Method for the Integration of DSA Via Patterning in sub-7 nm Circuits I Karageorgos, MC Tung, HSP Wong, E Karageorgos, R Gronheid, ... Proc. INC12, 2016 | | 2016 |
Templated DSA vias in sub-7 nm circuits: Design strategy and DSA-aware via decomposition I Karageorgos, J Ryckaert, R Gronheid, MC Tung, HSP Wong, ... International Symposium on DSA, 2016 | | 2016 |