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Venkata Sharat Parimi
Venkata Sharat Parimi
Verified email at stanford.edu
Title
Cited by
Cited by
Year
Exploring the effects of nanostructured particles on liquid nitromethane combustion
JL Sabourin, RA Yetter, VS Parimi
Journal of Propulsion and Power 26 (5), 1006-1015, 2010
542010
Enhancing ignition and combustion of micron-sized aluminum by adding porous silicon
VS Parimi, S Huang, X Zheng
Proceedings of the Combustion Institute 36 (2), 2317-2324, 2017
472017
Control of nanoenergetics through organized microstructures
VS Parimi, SA Tadigadapa, RA Yetter
Journal of Micromechanics and Microengineering 22 (5), 055011, 2012
402012
Facile thermal and optical ignition of silicon nanoparticles and micron particles
S Huang, VS Parimi, S Deng, S Lingamneni, X Zheng
Nano Letters 17 (10), 5925-5930, 2017
232017
Reactive wave propagation mechanisms in energetic porous silicon composites
VS Parimi, SA Tadigadapa, RA Yetter
Combustion Science and Technology 187 (1-2), 249-268, 2015
142015
Reactive wave propagation in energetic porous silicon composites
VS Parimi, AB Lozda, SA Tadigadapa, RA Yetter
Combustion and Flame 161 (11), 2991-2999, 2014
132014
Effect of substrate doping on microstructure and reactivity of porous silicon
VS Parimi, SA Tadigadapa, RA Yetter
Chemical Physics Letters 609, 129-133, 2014
132014
Technique to enable high temperature clean for rapid processing of wafers
VSC Parimi, Z Jiang, G Balasubramanian, VB Shah, S Srivastava, ...
US Patent App. 16/422,793, 2019
32019
Characterization of porous silicon for micropyrotechnic applications
VS Parimi
The Pennsylvania State University, 2015
32015
Targeted heat control systems
VSC Parimi, S Radhakrishnan, MIN Xiaoquan, SM Bobek, S Ha, ...
US Patent 11,600,470, 2023
22023
Electrostatic chucking process
SM Bobek, VSC Parimi, PK Kulshreshtha, KD Lee
US Patent App. 16/848,553, 2020
22020
Reduced defect deposition processes
MIN Xiaoquan, BI Song, HJ Woo, VSC Parimi, PK Kulshreshtha, K Lee
US Patent 11,821,082, 2023
12023
Substrate pedestal for improved substrate processing
V Kalsekar, VK Prabhakar, VSC Parimi
US Patent 11,587,773, 2023
12023
Radiation shield modification for improving substrate temperature uniformity
E Neville, S Radhakrishnan, K Shah, V Prabhakar, VSC Parimi, S Ha
US Patent 11,515,129, 2022
12022
Methods to eliminate of deposition on wafer bevel and backside
VSC Parimi, Z Huang, MVC Patil, N Pathak, Y Yang, BN RAMAMURTHI, ...
US Patent App. 17/127,201, 2022
12022
Gas mixer to enable RPS purging
R Fang, D Kedlaya, A Bansal, VSC Parimi, R Narayanan, BN Ramamurthi, ...
US Patent 11,862,475, 2024
2024
Heated pedestal design for improved heat transfer and temperature uniformity
VSC Parimi, Z Huang, J Li, S Radhakrishnan, R Cheng, DN Kedlaya, ...
US Patent 11,830,706, 2023
2023
Chamber components for gas delivery modulation
R Fang, D Kedlaya, T Van Nguyen, M Tong, SL Mings, VSC Parimi
US Patent 11,804,363, 2023
2023
Electrostatic chuck design with improved chucking and arcing performance
AA Khaja, VSC Parimi, SM Bobek, PK Kulshreshtha, VK Prabhakar
US Patent App. 18/201,086, 2023
2023
Pedestal for substrate processing chambers
SM Bobek, VSC Parimi, PK Kulshreshtha, VK Prabhakar, KD Lee, S Ha, ...
US Patent App. 18/111,842, 2023
2023
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