| Measurement of bandgap energies in low-k organosilicates MT Nichols, W Li, D Pei, GA Antonelli, Q Lin, S Banna, Y Nishi, JL Shohet Journal of Applied Physics 115 (9), 2014 | 136 | 2014 |
| Trapezoid mesa trench metal-oxide semiconductor barrier Schottky rectifier: an improved Schottky rectifier with better reverse characteristics L Wei-Yi, R Guo-Ping, J Yu-Long, R Gang Chinese Physics B 20 (8), 087304, 2011 | 16 | 2011 |
| Measurement of the vacuum-ultraviolet absorption spectrum of low-k dielectrics using X-ray reflectivity FA Choudhury, HM Nguyen, SW King, CH Lee, YH Lin, HS Fung, ... Applied Physics Letters 112 (8), 2018 | 6 | 2018 |
| Nonthermal combined ultraviolet and vacuum-ultraviolet curing process for organosilicate dielectrics H Zheng, X Guo, D Pei, W Li, J Blatz, K Hsu, D Benjamin, YH Lin, ... Applied Physics Letters 108 (24), 2016 | 6 | 2016 |
| Effects of ultraviolet and vacuum ultraviolet synchrotron radiation on organic underlayers to modulate line-edge roughness of fine-pitch poly-silicon patterns H Miyazoe, SU Engelmann, MA Guillorn, D Pei, W Li, JL Lauer, ... Journal of Vacuum Science & Technology A 35 (5), 2017 | 4 | 2017 |
| The effects of vacuum-ultraviolet radiation on defects in low-k organosilicate glass (SiCOH) as measured with electron-spin resonance P Xue, D Pei, H Zheng, W Li, VV Afanas' ev, MR Baklanov, JF de Marneffe, ... Thin Solid Films 616, 23-26, 2016 | 4 | 2016 |
| Influence of porosity on electrical properties of low-k dielectrics irradiated with vacuum-ultraviolet radiation FA Choudhury, HM Nguyen, MR Baklanov, JF de Marneffe, W Li, D Pei, ... Applied Physics Letters 109 (12), 2016 | 4 | 2016 |
| Effects of cesium ion-implantation on mechanical and electrical properties of organosilicate low-k films W Li, D Pei, X Guo, MK Cheng, S Lee, Q Lin, SW King, JL Shohet Applied Physics Letters 108 (20), 2016 | 4 | 2016 |
| Dielectric damage JL Shohet, Q Lin, SW King, H Ren, S Banna, JE Jakes, RJ Agasie, M Naik, ... ECS Transactions 60 (1), 733, 2014 | 4 | 2014 |
| Effects of cesium ion implantation on the mechanical and electrical properties of porous SiCOH low-k dielectrics W Li, D Pei, D Benjamin, JY Chang, SW King, Q Lin, JL Shohet Journal of Vacuum Science & Technology A 35 (6), 2017 | 2 | 2017 |
| Extrinsic time-dependent dielectric breakdown of low-k organosilicate thin films from vacuum-ultraviolet irradiation X Guo, D Pei, H Zheng, W Li, JL Shohet, SW King, YH Lin, HS Fung, ... Journal of Vacuum Science & Technology A 35 (2), 2017 | 2 | 2017 |
| A proposal of trapezoid mesa trench MOS barrier Schottky rectifier W Li, GP Ru, YL Jiang, G Ruan 2010 10th IEEE International Conference on Solid-State and Integrated …, 2010 | 2 | 2010 |
| Low dielectric constant (low-k) dielectric and method of forming the same JL Shohet, H Zheng, X Guo, W Li, J Blatz, D Pei US Patent 10,090,150, 2018 | | 2018 |
| The effect of vacuum ultraviolet irradiation on the time-dependent dielectric breakdown of organosilicate dielectrics D Pei, P Xue, W Li, X Guo, YH Lin, HS Fung, CC Chen, Y Nishi, JL Shohet Applied Physics Letters 109 (12), 2016 | | 2016 |
| The effects of VUV radiation on low-k organosilicate glass (SiCOH) as measured with electron-spin resonance P Xue, H Zheng, W Li, JF de Marneffe, M Baklanov, V Afanasiev, Y Nishi, ... AVS 62nd International Symposium and Exhibition, Date: 2015/01/01-2015/01/10 …, 2015 | | 2015 |
| Dielectric damage H Ren, S Banna, JE Jakes, RJ Agasie, M Naik, Y Nishi, MT Nichols, ... ECS Transactions, 2014 | | 2014 |
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