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Amir Wachs
Amir Wachs
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Title
Cited by
Cited by
Year
Shear-induced particle migration in a polydisperse concentrated suspension
A Shauly, A Wachs, A Nir
Journal of Rheology 42 (6), 1329-1348, 1998
1141998
Ethylene compressor monitoring using model‐based PCA
Y Rotem, A Wachs, DR Lewin
AIChE Journal 46 (9), 1825-1836, 2000
852000
Improved PCA methods for process disturbance and failure identification
A Wachs, DR Lewin
AIChE journal 45 (8), 1688-1700, 1999
811999
Simulated contact angle hysteresis of a three-dimensional drop on a chemically heterogeneous surface: a numerical example
S Brandon, A Wachs, A Marmur
Journal of colloid and interface science 191 (1), 110-116, 1997
811997
In situ module for particle removal from solid-state surfaces
Y Uziel, D Yogev, E Poles, A Wachs
US Patent 6,949,147, 2005
502005
Condensation-based enhancement of particle removal by suction
D Yogev, Y Uzeil, L Frisman, A Wachs
US Patent 6,799,584, 2004
442004
Shear-induced particle resuspension in settling polydisperse concentrated suspension
A Shauly, A Wachs, A Nir
International journal of multiphase flow 26 (1), 1-15, 2000
372000
Process monitoring using model-based PCA
A Wachs, DR Lewin
IFAC Proceedings Volumes 31 (11), 87-92, 1998
191998
Iterative defect filtering process
S Shabtay, I Kaizerman, A Wachs
US Patent 9,286,675, 2016
132016
Method of quality control in semiconductor device fabrication
A Wachs, D Cohen
US Patent 6,238,939, 2001
132001
Extreme contact scaling with advanced metallization of cobalt
R Hung, JH Park, TH Ha, M Lee, W Hou, J Lei, JR Bakke, S Sharma, ...
2018 IEEE International Interconnect Technology Conference (IITC), 30-32, 2018
102018
Control of a pilot-scale Karr liquid-liquid extraction column
A Wachs, J Benyamin, R Semiat, DR Lewin
Computers & chemical engineering 21, S601-S606, 1997
81997
Manufacture of ultra-clean surfaces by selective
W Huber, J Krueger, Y Uziel, A Wachs
US Patent App. 11/128,215, 2006
72006
Electron beam detection of cobalt trench embedded voids enabling improved process control for Middle-Of-Line at the 7nm node and beyond
N Breil, D Shemesh, J Fernandez, R Hung, N Bekiaris, J Tseng, M Naik, ...
2017 IEEE International Electron Devices Meeting (IEDM), 14.5. 1-14.5. 4, 2017
52017
Updating of a recipe for evaluating a manufacturing stage of an electrical circuit
A Wachs
US Patent 9,880,550, 2018
42018
Imaging of crystalline defects
D Shemesh, U Lev, B Colombeau, A Wachs, K Nafisi
US Patent 10,347,462, 2019
32019
Embedded metal voids detection to improve Copper metallization for advanced interconnect
J Tseng, M Naik, A Kumar, K Nafisi, JJ Lee, Z Wu, K Moraes, J Fernandez, ...
2018 IEEE International Interconnect Technology Conference (IITC), 169-171, 2018
22018
Characterization of leveling modes on i-line stepper
A Wachs, D Cohen, A Margalit-Ilovich
Optical Microlithography XIII 4000, 827-834, 2000
22000
Iterative defect filtering process
S Shabtay, I Kaizerman, A Wachs
US Patent 10,049,441, 2018
12018
Contaminants removal from epi substrates using vapor-laser process
A Wachs, S Zeid, Y Uziel, W Huber, J Krueger
Solid State Phenomena 103, 189-192, 2005
12005
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