Methods for selectively forming a target film on a substrate comprising a first dielectric surface and a second metallic surface D Longrie, S Deng, JW Maes US Patent 11,450,529, 2022 | 218 | 2022 |
Germanium surface passivation and atomic layer deposition of high-k dielectrics—a tutorial review on Ge-based MOS capacitors Q Xie, S Deng, M Schaekers, D Lin, M Caymax, A Delabie, XP Qu, ... Semiconductor Science and Technology 27 (7), 074012, 2012 | 206 | 2012 |
Selective passivation and selective deposition EE Tois, SP Haukka, RH Matero, E Färm, D Longrie, H Suemori, JW Maes, ... US Patent 11,094,535, 2021 | 58 | 2021 |
Atomic layer deposition-based synthesis of photoactive TiO 2 nanoparticle chains by using carbon nanotubes as sacrificial templates S Deng, SW Verbruggen, Z He, DJ Cott, PM Vereecken, JA Martens, ... Rsc Advances 4 (23), 11648-11653, 2014 | 55 | 2014 |
Silicon nanowire sensor for gas detection fabricated by nanoimprint on SU8/SiO2/PMMA trilayer J Wan, SR Deng, R Yang, Z Shu, BR Lu, SQ Xie, Y Chen, E Huq, R Liu, ... Microelectronic Engineering 86 (4-6), 1238-1242, 2009 | 55 | 2009 |
Air-based photoelectrochemical cell capturing water molecules from ambient air for hydrogen production J Rongé, S Deng, SP Sree, T Bosserez, SW Verbruggen, NK Singh, ... RSC advances 4 (55), 29286-29290, 2014 | 53 | 2014 |
Nanostructured TiO2/carbon nanosheet hybrid electrode for high-rate thin-film lithium-ion batteries S Moitzheim, CS Nimisha, S Deng, DJ Cott, C Detavernier, PM Vereecken Nanotechnology 25 (50), 504008, 2014 | 48 | 2014 |
Photocatalytic acetaldehyde oxidation in air using spacious TiO2 films prepared by atomic layer deposition on supported carbonaceous sacrificial templates SW Verbruggen, S Deng, M Kurttepeli, DJ Cott, PM Vereecken, S Bals, ... Applied Catalysis B: Environmental 160, 204-210, 2014 | 43 | 2014 |
Heterogeneous TiO2/V2O5/Carbon Nanotube Electrodes for Lithium-Ion Batteries M Kurttepeli, S Deng, F Mattelaer, DJ Cott, P Vereecken, J Dendooven, ... ACS Applied Materials & Interfaces 9 (9), 8055-8064, 2017 | 36 | 2017 |
Effective reduction of fixed charge densities in germanium based metal-oxide-semiconductor devices S Deng, Q Xie, D Deduytsche, M Schaekers, D Lin, M Caymax, A Delabie, ... Applied Physics Letters 99 (5), 2011 | 36 | 2011 |
Cu adhesion on tantalum and ruthenium surface: Density functional theory study SF Ding, SR Deng, HS Lu, YL Jiang, GP Ru, DW Zhang, XP Qu Journal of Applied Physics 107 (10), 2010 | 33 | 2010 |
Synthesis of uniformly dispersed anatase nanoparticles inside mesoporous silica thin films via controlled breakup and crystallization of amorphous TiO 2 deposited using atomic … SP Sree, J Dendooven, K Masschaele, HM Hamed, S Deng, S Bals, ... Nanoscale 5 (11), 5001-5008, 2013 | 32 | 2013 |
Silicon nanowires by combined nanoimprint and angle deposition for gas sensing applications C Gao, ZC Xu, SR Deng, J Wan, Y Chen, R Liu, E Huq, XP Qu Microelectronic Engineering 88 (8), 2100-2104, 2011 | 32 | 2011 |
Porous nanostructured metal oxides synthesized through atomic layer deposition on a carbonaceous template followed by calcination S Deng, M Kurttepeli, DJ Cott, S Bals, C Detavernier Journal of Materials Chemistry A 3 (6), 2642-2649, 2015 | 30 | 2015 |
Selective passivation and selective deposition JWH Maes, ME Givens, SP Haukka, V Paruchuri, IJ Raaijmakers, S Deng, ... US Patent 11,145,506, 2021 | 29 | 2021 |
22 nm silicon nanowire gas sensor fabricated by trilayer nanoimprint and wet etching C Gao, SR Deng, J Wan, BR Lu, R Liu, E Huq, XP Qu, Y Chen Microelectronic engineering 87 (5-8), 927-930, 2010 | 28 | 2010 |
Controllable nitrogen doping in as deposited TiO2 film and its effect on post deposition annealing S Deng, SW Verbruggen, S Lenaerts, JA Martens, S Van den Berghe, ... Journal of Vacuum Science & Technology A 32 (1), 2014 | 23 | 2014 |
High-Performance Ge MOS Capacitors byPlasma Passivation andAmbient Annealing Q Xie, S Deng, M Schaekers, D Lin, M Caymax, A Delabie, Y Jiang, X Qu, ... IEEE electron device letters 32 (12), 1656-1658, 2011 | 19 | 2011 |
Synthesis of a 3D network of Pt nanowires by atomic layer deposition on a carbonaceous template S Deng, M Kurttepeli, S Deheryan, DJ Cott, PM Vereecken, JA Martens, ... Nanoscale 6 (12), 6939-6944, 2014 | 17 | 2014 |
Surface plasmon polariton coupling induced transmission of subwavelength metallic grating with waveguide layer ZC Xu, B Dong, J Xue, R Yang, BR Lu, S Deng, ZF Li, W Lu, Y Chen, ... Microelectronic engineering 87 (5-8), 1297-1299, 2010 | 12 | 2010 |