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Romel Hidayat
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Density functional theory study on the fluorination reactions of silicon and silicon dioxide surfaces using different fluorine-containing molecules
T Chowdhury, R Hidayat, TR Mayangsari, J Gu, HL Kim, J Jung, WJ Lee
Journal of Vacuum Science & Technology A 37 (2), 2019
282019
Biopolymer-based slow/controlled-release fertilizer (SRF/CRF): Nutrient release mechanism and agricultural sustainability
A Firmanda, F Fahma, K Syamsu, M Mahardika, L Suryanegara, A Munif, ...
Journal of Environmental Chemical Engineering, 112177, 2024
242024
Out-of-plane polarization in a layered manganese chloride hybrid
ME Kamminga, R Hidayat, J Baas, GR Blake, T Palstra
APL materials 6 (6), 2018
202018
Selective etching mechanism of silicon oxide against silicon by hydrogen fluoride: a density functional theory study
R Hidayat, HL Kim, K Khumaini, T Chowdhury, TR Mayangsari, B Cho, ...
Physical Chemistry Chemical Physics 25 (5), 3890-3899, 2023
132023
Reactivity of different nitriding agents with chlorine-terminated surface during atomic layer deposition of silicon nitride
TR Mayangsari, LL Yusup, R Hidayat, T Chowdhury, YK Kwon, WJ Lee
Applied Surface Science 535, 147727, 2021
132021
Bias correction of daily satellite precipitation data using genetic algorithm
AW Pratama, A Buono, R Hidayat, H Harsa
IOP Conference Series: Earth and Environmental Science 149 (1), 012071, 2018
132018
Density functional theory study on the selective capping of cobalt on copper interconnect
K Khumaini, R Hidayat, TR Mayangsari, T Chowdhury, HL Kim, SI Lee, ...
Applied Surface Science 585, 152750, 2022
112022
Atomic layer deposition of titanium oxide thin films using a titanium precursor with a linked amido-cyclopentadienyl ligand
S Kim, R Hidayat, H Roh, J Kim, HL Kim, K Khumaini, M Park, JH Seok, ...
Journal of Materials Chemistry C 10 (17), 6696-6709, 2022
112022
Atomic layer deposition of tungsten and tungsten-based compounds using WCl5 and various reactants selected by density functional theory
M Lee, R Hidayat, DK Nandi, TH Kim, Y Kim, S Kim, WJ Lee, SH Kim
Applied Surface Science 563, 150373, 2021
102021
Density Functional Theory Study on the Reducing Agents for Atomic Layer Deposition of Tungsten Using Tungsten Chloride Precursor
R Hidayat, T Chowdhury, Y Kim, S Kim, TR Mayangsari, SH Kim, WJ Lee
Applied Surface Science, 148156, 2021
102021
Surface reaction of the hafnium precursor with a linked amido-cyclopentadienyl ligand: A density functional theory study
R Hidayat, HL Kim, H Kim, Y Byun, J Lee, WJ Lee
Journal of Vacuum Science & Technology A 39 (3), 2021
92021
Density functional theory study on the modification of silicon nitride surface by fluorine-containing molecules
T Chowdhury, R Hidayat, HL Kim, TR Mayangsari, S Cho, S Park, J Jung, ...
Applied Surface Science 554, 149481, 2021
72021
Etching mechanism of amorphous hydrogenated silicon nitride by hydrogen fluoride
K Khumaini, Y Kim, R Hidayat, T Chowdhury, HL Kim, B Cho, S Park, ...
Applied Surface Science 654, 159414, 2024
52024
Atomic layer deposition and tellurization of Ge–Sb film for phase-change memory applications
Y Kim, B Han, YJ Kim, J Shin, S Kim, R Hidayat, JM Park, W Koh, WJ Lee
RSC advances 9 (30), 17291-17298, 2019
42019
A theoretical study on the surface reaction of tetrakis (dimethylamino) titanium on titanium oxide
HL Kim, R Hidayat, K Khumaini, WJ Lee
Physical Chemistry Chemical Physics 25 (33), 22250-22257, 2023
32023
Erratum:“Density functional theory study on the fluorination reactions of silicon and silicon dioxide surfaces using different fluorine-containing molecules”[J. Vac. Sci …
T Chowdhury, R Hidayat, TR Mayangsari, J Gu, HL Kim, J Jung, WJ Lee
Journal of Vacuum Science & Technology A 40 (4), 2022
32022
Social Media in Education: Trends, Roles, Challenges, and Opportunities for Digital-Native Generations–A Systematic Literature Review
AD Samala, S Rawas, S Criollo-C, A Fortuna, X Feng, F Prasetya, ...
Asian Journal of University Education 20 (3), 524-539, 2024
22024
Gas-phase etching mechanism of silicon oxide by a mixture of hydrogen fluoride and ammonium fluoride: A density functional theory study
R Hidayat, K Khumaini, HL Kim, T Chowdhury, TR Mayangsari, S Cho, ...
Journal of Vacuum Science & Technology A 41 (3), 2023
22023
Preparation of tungsten-based thin films using a F-free W precursor and tert-butyl hydrazine via 2-and 3-step atomic layer deposition process
JH Lee, R Hidayat, R Ramesh, H Roh, DK Nandi, WJ Lee, SH Kim
Applied Surface Science 578, 152062, 2022
22022
Strong and Environmental-Friendly Adhesive Glass Based on Chitin Nanoparticles
S Sudirman, M Ardiansyah, NKT Dharmayani, E Yuanita, SS Kusuma, ...
Nano Hybrids and Composites 45, 11-18, 2024
2024
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