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Marian Bartek
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Bulk-micromachined tunable Fabry–Perot microinterferometer for the visible spectral range
JH Correia, M Bartek, RF Wolffenbuttel
Sensors and Actuators A: Physical 76 (1-3), 191-196, 1999
1021999
Single-chip CMOS optical microspectrometer
JH Correia, G De Graaf, SH Kong, M Bartek, RF Wolffenbuttel
Sensors and Actuators A: Physical 82 (1-3), 191-197, 2000
962000
Design and fabrication of on-chip integrated polySiGe and polySi Peltier devices
DDL Wijngaards, SH Kong, M Bartek, RF Wolffenbuttel
Sensors and Actuators A: Physical 85 (1-3), 316-323, 2000
892000
Vacuum sealing of microcavities using metal evaporation
M Bartek, JA Foerster, RF Wolffenbuttel
Sensors and Actuators A: Physical 61 (1-3), 364-368, 1997
871997
High-selectivity single-chip spectrometer in silicon for operation in visible part of the spectrum
JH Correia, M Bartek, RF Wolffenbuttel
IEEE Transactions on Electron Devices 47 (3), 553-559, 2000
752000
A micromachining post-process module for RF silicon technology
NP Pham, KT Ng, M Bartek, PM Sarro, B Rejaei, JN Burghartz
International Electron Devices Meeting 2000. Technical Digest. IEDM (Cat. No …, 2000
562000
A CMOS optical microspectrometer with light-to-frequency converter, bus interface, and stray-light compensation
JH Correia, G De Graaf, M Bartek, RF Wolffenbuttel
IEEE Transactions on Instrumentation and Measurement 50 (6), 1530-1537, 2001
462001
Silver-based reflective coatings for micromachined optical filters
M Bartek, JH Correia, RF Wolffenbuttel
Journal of Micromechanics and Microengineering 9 (2), 162, 1999
431999
Bipolar-compatible epitaxial poly for smart sensors: stress minimization and applications
PTJ Gennissen, M Bartek, PJ French, PM Sarro
Sensors and Actuators A: Physical 62 (1-3), 636-645, 1997
401997
A general purpose reconfigurable MEMS-based attenuator for radio frequency and microwave applications
J Iannacci, F Giacomozzi, S Colpo, B Margesin, M Bartek
IEEE EUROCON 2009 conference, Saint Petersburg, Russia, 18-23 May 2009, 1197 …, 2009
392009
RF–MEMS wafer-level packaging using through-wafer interconnect
J Tian, S Sosin, J Iannacci, R Gaddi, M Bartek
Sensors and Actuators A: Physical 142 (1), 442-451, 2008
382008
Dry release of metal structures in oxygen plasma: process characterization and optimization
M Bartek, RF Wolffenbuttel
Journal of Micromechanics and Microengineering 8 (2), 91, 1998
381998
Integrated chip-size antennas for wireless microsystems: Fabrication and design considerations
PM Mendes, A Polyakov, M Bartek, JN Burghartz, JH Correia
Sensors and Actuators A: Physical 125 (2), 217-222, 2006
362006
A review of visible-range Fabry–Perot microspectrometers in silicon for the industry
JP Carmo, RP Rocha, M Bartek, G de Graaf, RF Wolffenbuttel, JH Correia
Optics & Laser Technology 44 (7), 2312-2320, 2012
342012
Processability and electrical characteristics of glass substrates for RF wafer-level chip-scale packages
A Polyakov, PM Mendes, SM Sinaga, M Bartek, B Rejaei, JH Correia, ...
53rd Electronic Components and Technology Conference, May 27-30, 2003, New …, 2003
342003
A single-chip CMOS optical microspectrometer with light-to-frequency converter and bus interface
JH Correia, G de Graaf, M Bartek, RF Wolffenbuttel
IEEE Journal of Solid-State Circuits 37 (10), 1344-1347, 2002
342002
Integrated silicon microspectrometers
SH Kong, JH Correia, G De Graaf, M Bartek, RF Wolffenbuttel
IEEE Instrumentation & Measurement Magazine 4 (3), 34-38, 2001
342001
Wafer-level integration of on-chip antennas and RF passives using high-resistivity polysilicon substrate technology
PM Mendes, S Sinaga, A Polyakov, M Bartek, JN Burghartz, JH Correia
2004 Proceedings. 54th Electronic Components and Technology Conference (IEEE …, 2004
322004
Electromagnetic optimization of an RF-MEMS wafer-level package
J Iannacci, M Bartek, J Tian, R Gaddi, A Gnudi
Sensors and Actuators A: Physical 142 (1), 434-441, 2008
312008
Comparison of via-fabrication techniques for through-wafer electrical interconnect applications
A Polyakov, T Grob, RA Hovenkamp, HJ Kettelarij, I Eidner, ...
2004 Proceedings. 54th Electronic Components and Technology Conference (IEEE …, 2004
312004
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