| Measurement of bandgap energies in low-k organosilicates MT Nichols, W Li, D Pei, GA Antonelli, Q Lin, S Banna, Y Nishi, JL Shohet Journal of Applied Physics 115 (9), 2014 | 136 | 2014 |
| Time-dependent dielectric breakdown measurements of porous organosilicate glass using mercury and solid metal probes D Pei, MT Nichols, SW King, JS Clarke, Y Nishi, JL Shohet Journal of Vacuum Science & Technology A 32 (5), 2014 | 7 | 2014 |
| Nonthermal combined ultraviolet and vacuum-ultraviolet curing process for organosilicate dielectrics H Zheng, X Guo, D Pei, W Li, J Blatz, K Hsu, D Benjamin, YH Lin, ... Applied Physics Letters 108 (24), 2016 | 6 | 2016 |
| Effects of vacuum ultraviolet irradiation on trapped charges and leakage currents of low-k organosilicate dielectrics H Zheng, X Guo, D Pei, ET Ryan, Y Nishi, JL Shohet Applied Physics Letters 106 (19), 2015 | 6 | 2015 |
| Measurements of Schottky barrier at the low-k SiOC: H/Cu interface using vacuum ultraviolet photoemission spectroscopy X Guo, D Pei, H Zheng, SW King, YH Lin, HS Fung, CC Chen, Y Nishi, ... Applied Physics Letters 107 (23), 2015 | 5 | 2015 |
| A Waveguide‐Like Effect Observed in Multiwalled Carbon Nanotube Bundles S Xu, Y Yang, D Pei, X Zhao, Y Wang, W Sun, B Ma, Y Li, S Xie, LM Peng Advanced Functional Materials 20 (14), 2263-2268, 2010 | 5 | 2010 |
| Effects of ultraviolet and vacuum ultraviolet synchrotron radiation on organic underlayers to modulate line-edge roughness of fine-pitch poly-silicon patterns H Miyazoe, SU Engelmann, MA Guillorn, D Pei, W Li, JL Lauer, ... Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 35 (5 …, 2017 | 4 | 2017 |
| The effects of vacuum-ultraviolet radiation on defects in low-k organosilicate glass (SiCOH) as measured with electron-spin resonance P Xue, D Pei, H Zheng, W Li, VV Afanas' ev, MR Baklanov, JF de Marneffe, ... Thin Solid Films 616, 23-26, 2016 | 4 | 2016 |
| Influence of porosity on electrical properties of low-k dielectrics irradiated with vacuum-ultraviolet radiation FA Choudhury, HM Nguyen, MR Baklanov, JF de Marneffe, W Li, D Pei, ... Applied Physics Letters 109 (12), 2016 | 4 | 2016 |
| Effects of cesium ion-implantation on mechanical and electrical properties of organosilicate low-k films W Li, D Pei, X Guo, MK Cheng, S Lee, Q Lin, SW King, JL Shohet Applied Physics Letters 108 (20), 2016 | 4 | 2016 |
| Dielectric damage JL Shohet, Q Lin, SW King, H Ren, S Banna, JE Jakes, RJ Agasie, M Naik, ... ECS Transactions 60 (1), 733, 2014 | 4 | 2014 |
| Effects of cesium ion implantation on the mechanical and electrical properties of porous SiCOH low-k dielectrics W Li, D Pei, D Benjamin, JY Chang, SW King, Q Lin, JL Shohet Journal of Vacuum Science & Technology A 35 (6), 2017 | 2 | 2017 |
| Extrinsic time-dependent dielectric breakdown of low-k organosilicate thin films from vacuum-ultraviolet irradiation X Guo, D Pei, H Zheng, W Li, JL Shohet, SW King, YH Lin, HS Fung, ... Journal of Vacuum Science & Technology A 35 (2), 2017 | 2 | 2017 |
| The effects of vacuum ultraviolet irradiation on the electrical properties of porous low-k organosilicate glass D Pei The University of Wisconsin-Madison, 2016 | 1 | 2016 |
| Measuring the volume charge in dielectric films using single frequency electro-acoustic waves D Pei, YM Shkel, DJ Klingenberg, ZI Segal, Y Nishi, JL Shohet Journal of Materials Research 29 (4), 501-508, 2014 | 1 | 2014 |
| The effect of vacuum ultraviolet irradiation on the time-dependent dielectric breakdown of organosilicate dielectrics D Pei, P Xue, W Li, X Guo, YH Lin, HS Fung, CC Chen, Y Nishi, JL Shohet Applied Physics Letters 109 (12), 2016 | | 2016 |
| The effects of vacuum-ultraviolet radiation on defects in low-k organosilicate glass P Xue, D Pei, H Zheng, W Li, V Afanasiev, M Baklanov, JF de Marneffe, ... | | 2016 |
| Dielectric damage H Ren, S Banna, JE Jakes, RJ Agasie, M Naik, Y Nishi, MT Nichols, ... ECS Transactions, 2014 | | 2014 |
| Surface photoconductivity of organosilicate glass dielectrics induced by vacuum-ultraviolet radiation H Zheng, MT Nichols, D Pei, Y Nishi, JL Shohet Journal of Applied Physics 114 (6), 2013 | | 2013 |
| Low dielectric constant (low-k) dielectric and method of forming the same Y Ikeda, K Sawai US Patent 6,717,328, 2004 | | 2004 |
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