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Mehmet Selman Tamer
Mehmet Selman Tamer
Scientist Innovator
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Minimizing tip-sample forces and enhancing sensitivity in atomic force microscopy with dynamically compliant cantilevers
A Keyvani, H Sadeghian, MS Tamer, JFL Goosen, F van Keulen
Journal of Applied Physics 121 (24), 2017
222017
Simultaneous AFM nano-patterning and imaging for photomask repair
A Keyvani, MS Tamer, MH van Es, H Sadeghian
Proc. of SPIE Vol 9778, 977818-1, 2016
112016
A comprehensive model for transient behavior of tapping mode atomic force microscope
A Keyvani, MS Tamer, JW van Wingerden, JFL Goosen, F van Keulen
Nonlinear Dynamics 97, 1601-1617, 2019
72019
Image-based overlay measurement using subsurface ultrasonic resonance force microscopy
MS Tamer, MJ van der Lans, H Sadeghian
Metrology, Inspection, and Process Control for Microlithography XXXII 10585 ¡¦, 2018
72018
Quantitative measurement of tip-sample interaction forces in tapping mode atomic force microscopy
S Tamer, HS Marnani, SK Janbahan, H Goosen, F van Keulen
13th International Workshop on Nanomechanical Sensing, 2016
42016
Real-time estimation of the tip-sample interactions in tapping mode atomic force microscopy with a regularized Kalman filter
A Keyvani, G van der Veen, MS Tamer, H Sadeghian, H Goosen, ...
IEEE Transactions on Nanotechnology 19, 274-283, 2020
32020
Whispering-gallery modes observed in elastic scattering from submerged high-refractive-index silica microspheres
H Y©¥lmaz, H Y©¥lmaz, MS Tamer, O Gürlü, MS Murib, A Serpengüzel
Optical Engineering 56 (12), 126110-126110, 2017
22017
Method of modifying a surface of a sample, and a scanning probe microscopy system
HS Marnani, AK Janbahan, MS Tamer, K Maturova
US Patent App. 16/347,922, 2019
12019
Improved sub-surface AFM using photothermal actuation
ME Reijzen, MS Tamer, MH Es, M Riel, A Keyvani, H Sadeghian, ...
Metrology, Inspection, and Process Control for Microlithography XXXIII 10959 ¡¦, 2019
12019
GHz half wavelength contact acoustic microscopy (HaWaCAM): a feasibility study
BAJ Quesson, P Van Neer, MS Tamer, K Hatakeyama, MH Van Es, ...
Metrology, Inspection, and Process Control XXXVI 12053, 13-18, 2022
2022
Highly spatially resolved chemical metrology on latent resist images
M van Es, M Tamer, R Bloem, L Fillinger, E van Zeijl, K Maturová, ...
2022
Highly spatially resolved chemical metrology on latent resist images
E Mv, M Tamer, R Bloem, L Fillinger, Z Ev, K Maturová, D Jvd, R Willekers, ...
2022
Feasibility of 4 GHz half wavelength contact acoustic microscopy (HaWaCAM)
P Van Neer, BAJ Quesson, MS Tamer, K Hatakeyama, MH Van Es, ...
2021 IEEE International Ultrasonics Symposium (IUS), 1-4, 2021
2021
Determining interaction forces in a dynamic mode AFM during imaging
HS Marnani, MS Tamer
US Patent 10,578,643, 2020
2020
Sub-surface Imaging with Photo Thermal Actuation
ME van Reijzen, MS Tamer, MH van Es, M van Riel, T Duivenvoorde, ...
TNO, 2019
2019
High Resolution SubSurface Probe Microscopy for node5 applications
MH van Es, L Fillinger, MS Tamer, M van der Lans
SID Semicon Innovation Day, Science Centre Delft, 21 May 2019, 2019
2019
Frequency Modulation Sub-surface Atomic Force Microscopy
A Keyvani Janbahan, MS Tamer, MH van Es, MJ van der Lans
TNO, 2019
2019
Thermal nanolithography: a technology compatibility study
SRS Rajadurai, MS Tamer, P Paul, K Maturova, JA Wildschut, S Weber, ...
TNO, 2019
2019
Advanced Processing for Quantitative Sub-surface Data Extraction
L Fillinger, MS Tamer, MH van Es, MJ van der Lans
SID Semicon Innovation Day, Science Centre Delft, 21 May 2019, 2019
2019
Subsurface Ultrasonic Resonant Force Microscopy for Image-based Overlay Measurement
MS Tamer, MH van Es, H Sadeghian Marnani, MJ van der Lans
SID Semicon Innovation Day, Science Centre Delft, 21 May 2019, 2019
2019
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