Hyeongtag Jeon
Hyeongtag Jeon
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Morphology and phase stability of TiSi2 on Si
H Jeon, CA Sukow, JW Honeycutt, GA Rozgonyi, RJ Nemanich
Journal of applied physics 71 (9), 4269-4276, 1992
Remote Plasma Atomic Layer Deposition Apparatus and Method Using Dc Bias
HT Jeon, UJ Kim, J Kim, J Kim
US Patent App. 11/658,961, 2009
Apparatus for generating remote plasma
HT Jeon, IH Kim, SH Kim, CW Chung, SK Lee
US Patent App. 11/703,621, 2007
Formation of nanocrystalline Fe–Co powders produced by mechanical alloying
Y Do Kim, JY Chung, J Kim, H Jeon
Materials Science and Engineering: A 291 (1-2), 17-21, 2000
Characteristics of the ZnO thin film transistor by atomic layer deposition at various temperatures
S Kwon, S Bang, S Lee, S Jeon, W Jeong, H Kim, SC Gong, HJ Chang, ...
Semiconductor science and technology 24 (3), 035015, 2009
Apparatus for generating remote plasma
HT Jeon, S Woo, HC Kim, CW Chung
US Patent 8,207,470, 2012
History of atomic layer deposition and its relationship with the American Vacuum Society
GN Parsons, JW Elam, SM George, S Haukka, H Jeon, M Leskelš, ...
Journal of Vacuum Science & Technology A 31 (5), 2013
Atomic layer deposition and biocompatibility of titanium nitride nano-coatings on cellulose fiber substrates
GK Hyde, SD McCullen, S Jeon, SM Stewart, H Jeon, EG Loboa, ...
Biomedical materials 4 (2), 025001, 2009
Tuning the electronic structure of tin sulfides grown by atomic layer deposition
G Ham, S Shin, J Park, H Choi, J Kim, YA Lee, H Seo, H Jeon
ACS Applied Materials & Interfaces 5 (18), 8889-8896, 2013
Characteristics of HfO2 thin films grown by plasma atomic layer deposition
J Kim, S Kim, H Jeon, MH Cho, KB Chung, C Bae
Applied Physics Letters 87 (5), 2005
Microstructure and magnetic properties of nanosized Fe–Co alloy powders synthesized by mechanochemical and mechanical alloying process
BH Lee, BS Ahn, DG Kim, ST Oh, H Jeon, J Ahn, Y Do Kim
Materials Letters 57 (5-6), 1103-1107, 2003
Structural and electrical properties of ZnO thin films deposited by atomic layer deposition at low temperatures
S Jeon, S Bang, S Lee, S Kwon, W Jeong, H Jeon, HJ Chang, HH Park
Journal of the Electrochemical Society 155 (10), H738, 2008
Photocurrent detection of chemically tuned hierarchical ZnO nanostructures grown on seed layers formed by atomic layer deposition
S Bang, S Lee, Y Ko, J Park, S Shin, H Seo, H Jeon
Nanoscale research letters 7, 1-11, 2012
Remote plasma enhanced atomic layer deposition of TiN thin films using metalorganic precursor
JY Kim, S Seo, DY Kim, H Jeon, Y Kim
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 22 (1†…, 2004
Study on the characteristics of TiN thin film deposited by the atomic layer chemical vapor deposition method
H Jeon, JW Lee, YD Kim, DS Kim, KS Yi
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 18 (4†…, 2000
A study on H2 plasma treatment effect on a-IGZO thin film transistor
J Kim, S Bang, S Lee, S Shin, J Park, H Seo, H Jeon
Journal of Materials Research 27 (17), 2318-2325, 2012
Hydrogen-reduction behavior and microstructural characteristics of WO3–CuO powder mixtures with various milling time
DG Kim, ST Oh, H Jeon, CH Lee, Y Do Kim
Journal of alloys and compounds 354 (1-2), 239-242, 2003
Characteristics of ZrO2 gate dielectric deposited using Zr t–butoxide and Zr (NEt2) 4 precursors by plasma enhanced atomic layer deposition method
Y Kim, J Koo, J Han, S Choi, H Jeon, CG Park
Journal of applied physics 92 (9), 5443-5447, 2002
Ultrathin alumina-coated carbon nanotubes as an anode for high capacity Li-ion batteries
I Lahiri, SM Oh, JY Hwang, C Kang, M Choi, H Jeon, R Banerjee, YK Sun, ...
Journal of Materials Chemistry 21 (35), 13621-13626, 2011
TiN diffusion barrier grown by atomic layer deposition method for Cu metallization
J Uhm, H Jeon
Japanese Journal of Applied Physics 40 (7R), 4657, 2001
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