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Matthias Mühle
Matthias Mühle
Scientist, Fraunhofer USA - Center for Coatings and Diamond Technologies
Verified email at fraunhofer.org - Homepage
Title
Cited by
Cited by
Year
Extending microwave plasma assisted CVD SCD growth to pressures of 400 Torr
M Muehle, J Asmussen, MF Becker, T Schuelke
Diamond and Related Materials 79, 150-163, 2017
252017
Substrate crystal recovery for homoepitaxial diamond synthesis
M Muehle, MF Becker, T Schuelke, J Asmussen
Diamond and related materials 42, 8-14, 2014
182014
RF characterization of coplanar waveguide (CPW) transmission lines on single-crystalline diamond platform for integrated high power RF electronic systems
Y He, M Becker, T Grotjohn, A Hardy, M Muehle, T Schuelke, ...
2017 IEEE MTT-S International Microwave Symposium (IMS), 517-520, 2017
72017
Quantification of diffuse scattering in glass and polymers by parametric power law analysis of UV to NIR light
DV Tsu, M Muehle, M Becker, T Schuelke, J Slagter
Surface and Coatings Technology 336, 39-53, 2018
62018
Effects of boron doping on the bulk and surface acoustic phonons in single-crystal diamond
E Guzman, F Kargar, F Angeles, RV Meidanshahi, T Grotjohn, A Hardy, ...
ACS Applied Materials & Interfaces 14 (37), 42223-42231, 2022
52022
Quality and internal stress of single crystalline diamond synthesized by microwave plasma assisted chemical vapor deposition
M Muehle, MK Yaran, MF Becker, T Schuelke, J Asmussen, Y Gu, ...
New Diamond and Nano Carbons Conference, 2012
42012
Diamond metal-semiconductor field effect transistor for high temperature applications
Y Wu, C Herrera, A Hardy, M Muehle, T Zimmermann, TA Grotjohn
2019 Device Research Conference (DRC), 155-156, 2019
32019
Towards high-power multipliers using diamond Schottky barrier diodes
X Konstantinou, CJ Herrera-Rodriguez, J Lai, A Hardy, JD Albrecht, ...
2021 IEEE International Conference on Microwaves, Antennas, Communications …, 2021
22021
Process Development to Solve Critical Challenges Moving Towards Two Inch Single Crystalline Diamond Wafers
M Muehle
Michigan State University. Electrical Engineering, 2017
22017
Scalable Production and Supply Chain of Diamond Wafers Using Microwave Plasma: A Mini-Review
SV Baryshev, M Muehle
IEEE Transactions on Plasma Science, 2023
12023
Optical properties of Mo and amorphous MoOx, and application to antireflection coatings for metals
DV Tsu, M Muehle, H Köstenbauer, C Linke, J Winkler
Journal of Vacuum Science & Technology B 40 (2), 2022
12022
Deep etching substrates using a bi-layer etch mask
JH Seo, Y Zheng, M Muehle
US Patent 11,886,122, 2024
2024
Systems and methods for synthesizing a diamond using machine learning
RR Mekala, M Muehle, A Porter, M Lindvall, M Becker
US Patent App. 18/220,150, 2023
2023
Scalable Production and Supply Chain of Diamond using Microwave Plasma: a Mini-review
SV Baryshev, M Muehle
arXiv preprint arXiv:2308.00223, 2023
2023
Systems and methods for synthesizing a diamond using machine learning
RR Mekala, M Muehle, A Porter, M Lindvall, M Becker
US Patent 11,698,347, 2023
2023
Spectral emission properties of a nitrogen-doped diamond (001) photocathode: Hot electron transport and transverse momentum filtering
LA Angeloni, SV Baryshev, M Mühle, WA Schroeder
Physical Review B 107 (16), 165105, 2023
2023
Bilayer metal etch mask strategy for deep diamond etching
Y Zheng, M Muehle, J Lai, JD Albrecht, JH Seo
Journal of Vacuum Science & Technology B 40 (2), 2022
2022
(Invited) Diamond Technology – Integration into Solid-State Breakers and Biomedical Devices
T Zimmermann, A Rogien, G Jansen, X Wang, L Hua, Y Wu, M Muehle, ...
Electrochemical Society Meeting Abstracts 236, 1189-1189, 2019
2019
Chemical Mechanical Polishing of Single Crystalline Diamond Epitaxial Layers for Electronics Applications
A Hardy, C Herrera-Rodriguez, M Muehle, M Becker, E Drown, N Baule, ...
Irradiation of single crystal diamond for lift-off processes using proton and carbon beams
M Muehle, A Kayani, MF Becker, SJ Wickramarachchi, T Schuelke
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